Hans Högberg, Igor Abrikosov, Jens Birch, Manfred Beckers, Carina Höglund (Linköping)
Ulf Jansson, Karin Larsson and Urban Wiklund (Uppsala)
External Partners:
Prof. Michel Barsoum, Drexel Univ., USA.
Prof. Wolfhardt Möller, Rossendorf Forschungszentrum, Germany
Prof. Ivan Petrov, University of Illinois, Urbana, IL, USA
Prof. Magnus Odén, Luleå University of Technology, Sweden
Industry partners
SECO Tools AB
Kanthal AB
Scientific Objectives
Increase the understanding of nucleation and growth conditions for MAN-phases, in particular Ti2AlN and Ti4AlN3.
Try out conditions for forming a new Ti3AlN2-phase
Make the first MAN films containing Ga, In or Sc.
Identify phase composition and properties of nanocomposite films of corresponding (N-deficient) composition.
Technology Transfer Objectives
Show the feasibility of using MAN-phases as ohmic contacts to wide-band-gap epilayers of AlN or GaN
Research plan:
Use in situ X-ray Reflectivity measurements to characterize the conditions for nucleation and growth of 211, 312, and 413 type of MAN-phases during reactive magnetron sputtering of Ti and Al.
Reactive magnetron sputtering calculations to identify ternary systems with a large miscibility gap.
